The role of cascade atoms in the zero-influence and the low-bombarding-energy isotope sputtering
文献类型:期刊论文
作者 | L. P. Zheng |
刊名 | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
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出版日期 | 2000 |
卷号 | 160期号:1页码:29-32 |
关键词 | isotope sputtering momentum asymmetry cascade atoms monte-carlo simulation angular-distribution fractionation mo-92-mo-100 molybdenum targets |
ISSN号 | 0168-583X |
中文摘要 | Influence of cascade atoms on the preferential emission of isotopes during sputtering has been studied by a static Monte Carlo simulation program, for Zero-fluence and low-energy (below 1 keV) Xe ion bombardment of a Cu-63(0.5) Cu-65(0.5) target. Calculations show that the probabilities of the sputtered cascade atoms of Cu-63 and Cu-65 are over 80%. The calculations also show that towards the surface, the momentum flux of the cascade atoms of Cu-65 is much more than that of Cu-65. The momentum asymmetry in the collision cascade prays a dominating role in preferential emission of the lighter Cu-63 atoms in the near-normal direction during low-bombarding-energy Cu-63-Cu-65 sputtering. (C) 2000 Elsevier Science B.V. All rights reserved. |
原文出处 | |
公开日期 | 2012-04-14 |
源URL | [http://ir.imr.ac.cn/handle/321006/37277] ![]() |
专题 | 金属研究所_中国科学院金属研究所 |
推荐引用方式 GB/T 7714 | L. P. Zheng. The role of cascade atoms in the zero-influence and the low-bombarding-energy isotope sputtering[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,2000,160(1):29-32. |
APA | L. P. Zheng.(2000).The role of cascade atoms in the zero-influence and the low-bombarding-energy isotope sputtering.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,160(1),29-32. |
MLA | L. P. Zheng."The role of cascade atoms in the zero-influence and the low-bombarding-energy isotope sputtering".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 160.1(2000):29-32. |
入库方式: OAI收割
来源:金属研究所
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