Monte Carlo simulation of angular distribution and fractionation in the zero-fluence isotope sputtering
文献类型：期刊论文
| 作者 | L. P. Zheng |
| 刊名 | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
 |
| 出版日期 | 1998 |
| 卷号 | 142期号:1-2页码:30-34 |
| 关键词 | mo-92-mo-100 targets |
| ISSN号 | 0168-583X |
| 中文摘要 | A static Monte Carlo simulation program has been used to study the influence of primary and secondary knock-on atoms on the angular distribution and the fractionation, for zero-fluence sputtering of Mo-92-Mo-100. At 10 keV Xe ion energy, calculations show that significant depth-dependent momentum asymmetry exists in the near-surface region, as in Refs. (L.P. Zheng, R.S. Li, M.Y.LI, Nucl. Instr, and Meth. B 100 (1995) 490; L.P. Zheng, M.Y. Li, Nucl. Instr. and Meth. B 114(1996) 28). The calculations also show that at the polar emission angle range between 0 degrees and 90 degrees the probabilities of the sputtered primary knock-on atoms for Mo-92 and Mo-100 are small (6.1% for Mo-92 and 6.6% for Mo-100), especially, between 0 degrees and 30 degrees they are very small (2.5% for Mo-92 and 2.8% for Mo-100). At 0.1 keV Ar ion energy, the calculations show that partial momentum flux ratios, for the primary and the secondary knock-on atoms, deviate far from one, through marker plane 1 (about an atomic layer distance from the surface). (C) 1998 Elsevier Science B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/37901]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | L. P. Zheng. Monte Carlo simulation of angular distribution and fractionation in the zero-fluence isotope sputtering[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,1998,142(1-2):30-34. |
| APA | L. P. Zheng.(1998).Monte Carlo simulation of angular distribution and fractionation in the zero-fluence isotope sputtering.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,142(1-2),30-34. |
| MLA | L. P. Zheng."Monte Carlo simulation of angular distribution and fractionation in the zero-fluence isotope sputtering".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 142.1-2(1998):30-34. |
入库方式： OAI收割
来源：金属研究所
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