Surface-compositional and angular distributions during Cu-Pt sputtering
文献类型：期刊论文
| 作者 | L. P. Zheng ; R. S. Li |
| 刊名 | Journal of Materials Science & Technology
 |
| 出版日期 | 1998 |
| 卷号 | 14期号:4页码:335-338 |
| 关键词 | bombardment-induced segregation ar ion-bombardment molecular-dynamics ni alloys gibbsian segregation elements implantation simulations temperature mechanisms |
| ISSN号 | 1005-0302 |
| 中文摘要 | Under 1 keV Ar ion bombardment of Cu-Pt alloys at high fluence and low temperature, the depletion degree of the segregating species at the second surface layer, and the normalized sputtering yield ratios (non-segregating species/segregating species) in the near-normal direction (15 degrees) and at oblique angle (75 degrees), have been estimated by an improved kinetic BIGS (bombardment-induced Gibbsian segregation) model. For the bombarded Cu-Pt alloys, calculations show that the depletion degree of the segregating species at the second surface layer is small when its bulk composition equals the extreme value, but this depletion degree becomes large when its bulk composition equals the intermediate value. Furthermore, the difference of the normalized sputtering yield ratio between 15 degrees and 75 degrees is small when the bulk composition of the segregating species equals the extreme value, but this difference becomes large when that of the segregating species equals the intermediate value. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/37902]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | L. P. Zheng,R. S. Li. Surface-compositional and angular distributions during Cu-Pt sputtering[J]. Journal of Materials Science & Technology,1998,14(4):335-338. |
| APA | L. P. Zheng,&R. S. Li.(1998).Surface-compositional and angular distributions during Cu-Pt sputtering.Journal of Materials Science & Technology,14(4),335-338. |
| MLA | L. P. Zheng,et al."Surface-compositional and angular distributions during Cu-Pt sputtering".Journal of Materials Science & Technology 14.4(1998):335-338. |
入库方式： OAI收割
来源：金属研究所
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