中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys

文献类型:期刊论文

作者L. P. Zheng ; R. S. Li
刊名Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
出版日期1997
卷号129期号:1页码:16-20
关键词bombardment-induced segregation ar ion-bombardment gibbsian segregation enhanced diffusion eutectic alloy binary-alloys temperature elements implantation simulations
ISSN号0168-583X
中文摘要Under 1 keV Ar ion bombardment of Cu-Pt and Cu-Ni alloys at high fluence at low temperature, the depletion degree of the segregating species at the second surface layer, and the normalized sputtering yield ratios (non-segregating species/segregating species) in the near-normal direction (15 degrees) and at oblique angles (75 degrees), have been estimated by an improved kinetic BIGS (Bombardment-Induced Gibbsian Segregation) model. For both the bombarded Cu-Pt and the bombarded Cu-Wi alloys, calculations show that the depletion degree of the segregating species at the second surface layer is small when its bulk composition equals the extreme value, but this depletion degree becomes large when its bulk composition equals the intermediate value. Furthermore, the difference of the normalized sputtering yield ratio between 15 degrees and 75 degrees is small when the bulk composition of the segregating species equals the extreme value, but this difference becomes large when that of the segregating species equals the intermediate value.
原文出处://WOS:A1997XJ08900004
公开日期2012-04-14
源URL[http://ir.imr.ac.cn/handle/321006/38226]  
专题金属研究所_中国科学院金属研究所
推荐引用方式
GB/T 7714
L. P. Zheng,R. S. Li. Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,1997,129(1):16-20.
APA L. P. Zheng,&R. S. Li.(1997).Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,129(1),16-20.
MLA L. P. Zheng,et al."Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 129.1(1997):16-20.

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来源:金属研究所

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