On the relation between preferential emission and bulk composition in binary alloy sputtering
文献类型：期刊论文
| 作者 | L. P. Zheng ; R. S. Li ; S. Y. Li |
| 刊名 | Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films
 |
| 出版日期 | 1997 |
| 卷号 | 15期号:4页码:2431-2433 |
| 关键词 | surface-composition changes ar ion-bombardment gibbsian segregation ni alloys elements implantation temperature depth |
| ISSN号 | 0734-2101 |
| 中文摘要 | Under simulated 1 keV Ar ion bombardment at low temperatures, the angular distributions of the steady sputter state of Cu-Ni alloys have been studied with the help of a dynamic Monte Carlo program. Calculations show the preferential emission of Ni in the near-normal direction, but that of Cu at oblique angles. Calculations also show that these preferential emissions strongly depend on the bulk composition. (C) 1997 American Vacuum Society. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/38227]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | L. P. Zheng,R. S. Li,S. Y. Li. On the relation between preferential emission and bulk composition in binary alloy sputtering[J]. Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films,1997,15(4):2431-2433. |
| APA | L. P. Zheng,R. S. Li,&S. Y. Li.(1997).On the relation between preferential emission and bulk composition in binary alloy sputtering.Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films,15(4),2431-2433. |
| MLA | L. P. Zheng,et al."On the relation between preferential emission and bulk composition in binary alloy sputtering".Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films 15.4(1997):2431-2433. |
入库方式： OAI收割
来源：金属研究所
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