ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING
文献类型：期刊论文
| 作者 | L. P. Zheng ; R. S. Li ; M. Y. Li ; M. Chen ; X. Q. Xia |
| 刊名 | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
 |
| 出版日期 | 1992 |
| 卷号 | 71期号:1页码:39-43 |
| 关键词 | bombardment-induced segregation monte-carlo simulation surface segregation cu implantation depth |
| ISSN号 | 0168-583X |
| 中文摘要 | Evolutions of angular distributions and surface composition profiles of a sputtered Pt0.5Cu0.5 alloy were simulated under 1 keV Ar ion bombardment at normal incidence, with the help of a dynamic Monte Carlo program including preferential sputtering and BIGS (bombardment-induced Gibbsian segregation) processes etc. It is found during the PtCu alloy sputtering that the Cu enrichment in the near-normal direction is regularly transformed into the Pt one as the Ar ion fluence increases. Below a low fluence of about 1.7 ions/cm2, Cu is preferentially ejected in the near-normal direction; above 1.7 ions/cm2, on the other hand, Pt is preferentially ejected in the near-normal direction instead of Cu. Effects of preferential sputtering and BIGS processes on enrichment transformation between Cu and Pt elements in the near-normal direction are also discussed. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/39359]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | L. P. Zheng,R. S. Li,M. Y. Li,et al. ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,1992,71(1):39-43. |
| APA | L. P. Zheng,R. S. Li,M. Y. Li,M. Chen,&X. Q. Xia.(1992).ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,71(1),39-43. |
| MLA | L. P. Zheng,et al."ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 71.1(1992):39-43. |
入库方式： OAI收割
来源：金属研究所
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