Transparent conductive oxide semiconductor ZnO:Al films produced by magnetron reactive sputtering
文献类型：期刊论文
| 作者 | Chen Meng, Pei Zhiliang, Wang Xi, Sun Cao, Wen Lishi |
| 刊名 | Mat. Es. Soc. Symp. Proc. 666(2001)F1.2.1-F.1.2.6
 |
| 出版日期 | 2001 |
| 卷号 | 666期号:0页码:F121-F126 |
| 公开日期 | 2012-05-31 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109059]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Chen Meng, Pei Zhiliang, Wang Xi, Sun Cao, Wen Lishi. Transparent conductive oxide semiconductor ZnO:Al films produced by magnetron reactive sputtering[J]. Mat. Es. Soc. Symp. Proc. 666(2001)F1.2.1-F.1.2.6,2001,666(0):F121-F126. |
| APA | Chen Meng, Pei Zhiliang, Wang Xi, Sun Cao, Wen Lishi.(2001).Transparent conductive oxide semiconductor ZnO:Al films produced by magnetron reactive sputtering.Mat. Es. Soc. Symp. Proc. 666(2001)F1.2.1-F.1.2.6,666(0),F121-F126. |
| MLA | Chen Meng, Pei Zhiliang, Wang Xi, Sun Cao, Wen Lishi."Transparent conductive oxide semiconductor ZnO:Al films produced by magnetron reactive sputtering".Mat. Es. Soc. Symp. Proc. 666(2001)F1.2.1-F.1.2.6 666.0(2001):F121-F126. |
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