Nanomachining of Permalloy for Fabricating Nanoscale Ferromagnetic Structures Using Atomic Force Microscopy
文献类型：期刊论文
| 作者 | Tseng AA ; Shirakashi J ; Nishimura S ; Miyashita K ; Li Z |
| 刊名 | journal of nanoscience and nanotechnology
 |
| 出版日期 | 2010 |
| 卷号 | 10期号:1页码:456-466 |
| 关键词 | NANOFABRICATION LITHOGRAPHY FILMS TIP |
| ISSN号 | 1533-4880 |
| 通讯作者 | tseng aa |
| 中文摘要 | it is well-known that the tip of an atomic force microscope (afm) can act as a cutting tool for machining various types of materials. in this article, afm machining experiments have been conducted to investigate the machining characteristics of a nickel-iron thin film material. the influences of the machining parameters on the resulting machined geometries and surfaces are specifically investigated. the machining parameters considered include the normal applied force, number of machining cycles, machining speed, and machining direction. to demonstrate its versatility, the machining technique developed has been applied for fabricating a nife based nanostructure required by many ferromagnetic devices. all results indicate that the machined groove size can be well correlated with and precisely controlled by the applied force and the machining cyclic number. the afm machining technique is indeed simple and predictable for machining nanostructures with specified dimension and controllable precision. |
| 收录类别 | SCI收录期刊论文 |
| 语种 | 英语 |
| WOS记录号 | WOS:000272388700071 |
| 公开日期 | 2012-06-07 |
| 源URL | [http://ir.ciac.jl.cn/handle/322003/43997]  |
| 专题 | 长春应用化学研究所_长春应用化学研究所知识产出_期刊论文 |
| 推荐引用方式 GB/T 7714 | Tseng AA,Shirakashi J,Nishimura S,et al. Nanomachining of Permalloy for Fabricating Nanoscale Ferromagnetic Structures Using Atomic Force Microscopy[J]. journal of nanoscience and nanotechnology,2010,10(1):456-466. |
| APA | Tseng AA,Shirakashi J,Nishimura S,Miyashita K,&Li Z.(2010).Nanomachining of Permalloy for Fabricating Nanoscale Ferromagnetic Structures Using Atomic Force Microscopy.journal of nanoscience and nanotechnology,10(1),456-466. |
| MLA | Tseng AA,et al."Nanomachining of Permalloy for Fabricating Nanoscale Ferromagnetic Structures Using Atomic Force Microscopy".journal of nanoscience and nanotechnology 10.1(2010):456-466. |
入库方式： OAI收割
来源：长春应用化学研究所
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