Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates
文献类型：期刊论文
| ; | |
| 作者 | Song, Binbin; Wu, Ping; Chen, Sen; Zhang, Shiping; Yan, Dan; Xue, Lian; Wu, P.(pingwu@sas.ustb.edu.cn) |
| 刊名 | surface and interface analysis
 ; Surface and Interface Analysis
|
| 出版日期 | 2011 ; 2011 |
| 关键词 | Adhesion Auger electron spectroscopy Fabrication Hardness Magnetron sputtering Martensitic steel Morphology Nanoindentation Protective coatings Scanning electron microscopy Silicon wafers X ray photoelectron spectroscopy Adhesion Auger Electron Spectroscopy Fabrication Hardness Magnetron Sputtering Martensitic Steel Morphology Nanoindentation Protective Coatings Scanning Electron Microscopy Silicon Wafers x Ray Photoelectron Spectroscopy |
| ISSN号 | 01422421 ; 01422421 |
| 通讯作者 | wu, p.(pingwu@sas.ustb.edu.cn) |
| 英文摘要 | Al2O3, Al2O3/Al and Al2O3-Al graded coatings were fabricated on China low activation martensitic steel and silicon substrates by RF magnetron sputtering. The coating composition and cross-section morphologies were investigated using X-ray photoelectron spectroscopy, Auger electron spectroscopy and field-emission scanning electron microscopy. The mechanical properties of the coatings were studied using nanoindentation, wafer-curvature measurements and microscratch tests. The results show that usable Al2O3-Al graded coatings could be fabricated. With a more continuous compositional gradient, the interface zone was more compact. The hardness and elastic modulus of Al2O3-Al graded coatings were less than those of Al2O3 coatings, but greater than those of Al2O3/Al coatings. After annealing at773K for3h, the hardness of Al2O3-Al graded coating showed a small increase. The residual stresses in Al2O3-Al graded coatings declined to about0.3GPa, compared with the6.6GPa for Al2O3 coating. The adhesion of Al2O3 was improved by deposition of Al or Al compositional gradient oxide layers.?2011 John Wiley& Sons, Ltd. |
| 学科主题 | 半导体材料 ; 半导体材料 |
| 收录类别 | EI |
| 语种 | 英语 ; 英语 |
| 公开日期 | 2012-06-14 ; 2012-06-14 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/23142]  |
| 专题 | 半导体研究所_中科院半导体照明研发中心 |
| 通讯作者 | Wu, P.(pingwu@sas.ustb.edu.cn) |
| 推荐引用方式 GB/T 7714 | Song, Binbin,Wu, Ping,Chen, Sen,et al. Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates, Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates[J]. surface and interface analysis, Surface and Interface Analysis,2011, 2011. |
| APA | Song, Binbin.,Wu, Ping.,Chen, Sen.,Zhang, Shiping.,Yan, Dan.,...&Wu, P..(2011).Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates.surface and interface analysis. |
| MLA | Song, Binbin,et al."Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates".surface and interface analysis (2011). |
入库方式： OAI收割
来源：半导体研究所
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