Tunable filters based on an SOI nano-wire waveguide micro ring resonator
文献类型：期刊论文
| ; | |
| 作者 | Li, Shuai; Wu, Yuanda; Yin, Xiaojie; An, Junming; Li, Jianguang; Wang, Hongjie; Hu, Xiongwei; Li, S.(lshsemi@semi.ac.cn) |
| 刊名 | journal of semiconductors
 ; Journal of Semiconductors
|
| 出版日期 | 2011 ; 2011 |
| 卷号 | 32期号:8页码:84007 |
| 关键词 | Crosstalk Electron beams Nanowires Optical resonators Photolithography Tuning Waveguides Crosstalk Electron Beams Nanowires Optical Resonators Photolithography Tuning Waveguides |
| ISSN号 | 16744926 ; 16744926 |
| 通讯作者 | li, s.(lshsemi@semi.ac.cn) |
| 英文摘要 | Micro ring resonator(MRR) filters based on a silicon on insulator(SOI) nanowire waveguide are fabricated by electron beam photolithography(EBL) and inductive coupled plasma(ICP) etching technology. The cross-section size of the strip waveguides is450×220 nm2, and the bending radius of the micro ring is around5μm. The test results from the tunable filter based on a single ring show that the free spectral range(FSR) is16.8 nm and the extinction ratio(ER) around the wavelength1550 nm is18.1 dB. After thermal tuning, the filter's tuning bandwidth reaches4.8 nm with a tuning efficiency of0.12 nm/°C Meanwhile, we fabricated and studied multi-channel filters based on a single ring and a double ring. After measurement, we drew the following conclusions: during the signal transmission of multi-channel filters, crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports.?2011 Chinese Institute of Electronics. |
| 学科主题 | 光电子学 ; 光电子学 |
| 收录类别 | EI |
| 语种 | 英语 ; 英语 |
| 公开日期 | 2012-06-14 ; 2012-06-14 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/23105]  |
| 专题 | 半导体研究所_光电子研究发展中心 |
| 通讯作者 | Li, S.(lshsemi@semi.ac.cn) |
| 推荐引用方式 GB/T 7714 | Li, Shuai,Wu, Yuanda,Yin, Xiaojie,et al. Tunable filters based on an SOI nano-wire waveguide micro ring resonator, Tunable filters based on an SOI nano-wire waveguide micro ring resonator[J]. journal of semiconductors, Journal of Semiconductors,2011, 2011,32, 32(8):84007, 84007. |
| APA | Li, Shuai.,Wu, Yuanda.,Yin, Xiaojie.,An, Junming.,Li, Jianguang.,...&Li, S..(2011).Tunable filters based on an SOI nano-wire waveguide micro ring resonator.journal of semiconductors,32(8),84007. |
| MLA | Li, Shuai,et al."Tunable filters based on an SOI nano-wire waveguide micro ring resonator".journal of semiconductors 32.8(2011):84007. |
入库方式： OAI收割
来源：半导体研究所
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