Effects of sputtering power on phase transition of vanadium oxide thin film by radio frequency magnetron sputtering
文献类型：期刊论文
| 作者 | Liang, Ji-Ran ; Hu, Ming ; Liang, Xiu-Qin ; Kan, Qiang ; Chen, Tao ; Chen, Hong-Da |
| 刊名 | tianjin daxue xuebao(ziran kexue yu gongcheng jishu ban)/journal of tianjin university science and technology
 |
| 出版日期 | 2011 |
| 卷号 | 44期号:10页码:847-851 |
| 关键词 | Annealing Magnetron sputtering Oxide films Oxides Photoelectron spectroscopy Thin films Vanadium Vanadium alloys Vanadium compounds X ray diffraction X ray diffraction analysis X ray photoelectron spectroscopy |
| ISSN号 | 04932137 |
| 通讯作者 | liang, j.-r.(ljiranbo@yahoo.com.cn) |
| 学科主题 | 微电子学 |
| 收录类别 | EI |
| 语种 | 中文 |
| 公开日期 | 2012-06-14 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/23063]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Liang, Ji-Ran,Hu, Ming,Liang, Xiu-Qin,et al. Effects of sputtering power on phase transition of vanadium oxide thin film by radio frequency magnetron sputtering[J]. tianjin daxue xuebao(ziran kexue yu gongcheng jishu ban)/journal of tianjin university science and technology,2011,44(10):847-851. |
| APA | Liang, Ji-Ran,Hu, Ming,Liang, Xiu-Qin,Kan, Qiang,Chen, Tao,&Chen, Hong-Da.(2011).Effects of sputtering power on phase transition of vanadium oxide thin film by radio frequency magnetron sputtering.tianjin daxue xuebao(ziran kexue yu gongcheng jishu ban)/journal of tianjin university science and technology,44(10),847-851. |
| MLA | Liang, Ji-Ran,et al."Effects of sputtering power on phase transition of vanadium oxide thin film by radio frequency magnetron sputtering".tianjin daxue xuebao(ziran kexue yu gongcheng jishu ban)/journal of tianjin university science and technology 44.10(2011):847-851. |
入库方式： OAI收割
来源：半导体研究所
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