Fabrication and characterisation of polysilicon-based clamped-clamped filter
文献类型：期刊论文
| 作者 | Zhao, Yongmei ; Ning, Jin ; Han, Guowei ; Si, Chaowei |
| 刊名 | key engineering materials
 |
| 出版日期 | 2011 |
| 卷号 | 483页码:112-116 |
| 关键词 | Electromechanical filters Fabrication Microelectromechanical devices Nanotechnology Polysilicon Resonators Technology |
| ISSN号 | 10139826 |
| 通讯作者 | zhao, y.(ymzhao@semi.ac.cn) |
| 学科主题 | 微电子学 |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2012-06-14 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/23067]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Zhao, Yongmei,Ning, Jin,Han, Guowei,et al. Fabrication and characterisation of polysilicon-based clamped-clamped filter[J]. key engineering materials,2011,483:112-116. |
| APA | Zhao, Yongmei,Ning, Jin,Han, Guowei,&Si, Chaowei.(2011).Fabrication and characterisation of polysilicon-based clamped-clamped filter.key engineering materials,483,112-116. |
| MLA | Zhao, Yongmei,et al."Fabrication and characterisation of polysilicon-based clamped-clamped filter".key engineering materials 483(2011):112-116. |
入库方式： OAI收割
来源：半导体研究所
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