Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films
文献类型：期刊论文
| 作者 | Song, Zhaorui (Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) ; Cheng, Xinhong ; Zhang, Enxia ; Xing, Yumei ; Yu, Yuehui ; Zheng, Zhihong ; Shen, Qinwo ; Zhang, Zhengxuan ; Wang, Xi |
| 刊名 | He Jishu/Nuclear Techniques, v 30, n 8, August, 2007
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| 出版日期 | 2007 |
| 卷号 | 30期号:8 |
| 收录类别 | SCI |
| 公开日期 | 2012-06-13 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109072]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Song, Zhaorui ,Cheng, Xinhong,Zhang, Enxia,et al. Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films[J]. He Jishu/Nuclear Techniques, v 30, n 8, August, 2007,2007,30(8). |
| APA | Song, Zhaorui .,Cheng, Xinhong.,Zhang, Enxia.,Xing, Yumei.,Yu, Yuehui.,...&Wang, Xi.(2007).Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films.He Jishu/Nuclear Techniques, v 30, n 8, August, 2007,30(8). |
| MLA | Song, Zhaorui ,et al."Effects of nitrogen element on total-dose irradiation response of high-k Hf-based dielectric films".He Jishu/Nuclear Techniques, v 30, n 8, August, 2007 30.8(2007). |
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