Effect of Xe+ ion bombardment during titanium deposition in nitrogen atmosphere
文献类型：期刊论文
| 作者 | Xi Wang, Genqing Yang, Xianghuai Liu, Zhihong Zheng, Wei Huang and Shichang Zou |
| 刊名 | Materials Science and Engineering, A156(1992)91-95
 |
| 出版日期 | 1992 |
| 卷号 | 156期号:1页码:91-95 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-06-13 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109073]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xi Wang, Genqing Yang, Xianghuai Liu, Zhihong Zheng, Wei Huang and Shichang Zou. Effect of Xe+ ion bombardment during titanium deposition in nitrogen atmosphere[J]. Materials Science and Engineering, A156(1992)91-95,1992,156(1):91-95. |
| APA | Xi Wang, Genqing Yang, Xianghuai Liu, Zhihong Zheng, Wei Huang and Shichang Zou.(1992).Effect of Xe+ ion bombardment during titanium deposition in nitrogen atmosphere.Materials Science and Engineering, A156(1992)91-95,156(1),91-95. |
| MLA | Xi Wang, Genqing Yang, Xianghuai Liu, Zhihong Zheng, Wei Huang and Shichang Zou."Effect of Xe+ ion bombardment during titanium deposition in nitrogen atmosphere".Materials Science and Engineering, A156(1992)91-95 156.1(1992):91-95. |
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