Research on the effect of nitrogen implantation doses with the structure of separated by implanted oxygen and nitrogen
文献类型：期刊论文
| 作者 | Enxia zhang, Wanbing Yi ; Jing Chen, Zhengxuan Zhang ; Xi Wang |
| 刊名 | Smart Materials and Structures, 14, (2005) P42-45
 |
| 出版日期 | 2005 |
| 卷号 | 14页码:42-45 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-06-13 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109079]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Enxia zhang, Wanbing Yi,Jing Chen, Zhengxuan Zhang,Xi Wang. Research on the effect of nitrogen implantation doses with the structure of separated by implanted oxygen and nitrogen[J]. Smart Materials and Structures, 14, (2005) P42-45,2005,14:42-45. |
| APA | Enxia zhang, Wanbing Yi,Jing Chen, Zhengxuan Zhang,&Xi Wang.(2005).Research on the effect of nitrogen implantation doses with the structure of separated by implanted oxygen and nitrogen.Smart Materials and Structures, 14, (2005) P42-45,14,42-45. |
| MLA | Enxia zhang, Wanbing Yi,et al."Research on the effect of nitrogen implantation doses with the structure of separated by implanted oxygen and nitrogen".Smart Materials and Structures, 14, (2005) P42-45 14(2005):42-45. |
入库方式： OAI收割
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