Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy
文献类型：期刊论文
| 作者 | Wang, Chunmei（王春梅） ; Sun, Jielin（孙洁林） ; Itoh, Hiroshi ; Shen, Dianhong ; Hu, Jun（胡钧） |
| 刊名 | ANALYTICAL SCIENCES
 |
| 出版日期 | 2011 |
| 卷号 | 27期号:2页码:143 |
| ISSN号 | 0910-6340 |
| 英文摘要 | It is well known that the topography in atomic force microscopy (AFM) is a convolution of the tip's shape and the sample's geometry. The classical convolution model was established in contact mode assuming a static probe, but it is no longer valid in dynamic mode AFM. It is still not well understood whether or how the vibration of the probe in dynamic mode affects the convolution. Such ignorance complicates the interpretation of the topography. Here we propose a convolution model for dynamic mode by taking into account the typical design of the cantilever tilt in AFMs, which leads to a different convolution from that in contact mode. Our model indicates that the cantilever tilt results in a dynamic convolution affected by the absolute value of the amplitude, especially in the case that corresponding contact convolution has sharp edges beyond certain angle. The effect was experimentally demonstrated by a perpendicular SiO(2)/Si super-lattice structure. Our model is useful for quantitative characterizations in dynamic mode, especially in probe characterization and critical dimension measurements. |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000287823700005 |
| 公开日期 | 2012-07-04 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/9465]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 推荐引用方式 GB/T 7714 | Wang, Chunmei,Sun, Jielin,Itoh, Hiroshi,et al. Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy[J]. ANALYTICAL SCIENCES,2011,27(2):143. |
| APA | Wang, Chunmei,Sun, Jielin,Itoh, Hiroshi,Shen, Dianhong,&Hu, Jun.(2011).Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy.ANALYTICAL SCIENCES,27(2),143. |
| MLA | Wang, Chunmei,et al."Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy".ANALYTICAL SCIENCES 27.2(2011):143. |
入库方式： OAI收割
来源：上海应用物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。