中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Fabrication and application of high quality poly(dimethylsiloxane) stamps by gamma ray irradiation

文献类型:期刊论文

作者Li, JingYe(李景烨)
刊名JOURNAL OF MATERIALS CHEMISTRY
出版日期2011
卷号21期号:12页码:4279
ISSN号0959-9428
英文摘要Poly(dimethylsiloxane) (PDMS) is the most widely used stamp material in soft lithography. Usually, it is thermally vulcanized and can't satisfy all the demands of the resolution, purity and solvent compatibility. In this work, high energy gamma rays are used to crosslink the PDMS base to fabricate stamps designed for soft lithography without the use of a catalyst. PDMS stamps fabricated in this way have several advantages including high resolution, purity and solvent resistance. The PDMS stamp crosslinked at an absorbed dose of 800 kGy has a roughness of 0.18 nm in blank area and can replicate features with the height of 1.1 nm. The amount of uncrosslinked molecules in the bulk of the stamp is only half of that of the 'standard' stamp (made by Sylgard (TM) 184 at the base/cure agent ratio of 10). Furthermore, the shear elastic modulus of stamps made by radiation induced crosslinking increases with the absorbed dose in the range of 400 kGy to 800 kGy and is higher than that of 'standard' stamps. By measuring the glass transition temperature and calculating molecular weights between crosslinkers, we conclude that the enhancement of stamps' quality can be ascribed to the increase of crosslinking density under gamma ray irradiation.
收录类别SCI
语种英语
WOS记录号WOS:000288220600041
公开日期2012-07-04
源URL[http://ir.sinap.ac.cn/handle/331007/9511]  
专题上海应用物理研究所_中科院上海应用物理研究所2011-2017年
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Li, JingYe. Fabrication and application of high quality poly(dimethylsiloxane) stamps by gamma ray irradiation[J]. JOURNAL OF MATERIALS CHEMISTRY,2011,21(12):4279.
APA Li, JingYe.(2011).Fabrication and application of high quality poly(dimethylsiloxane) stamps by gamma ray irradiation.JOURNAL OF MATERIALS CHEMISTRY,21(12),4279.
MLA Li, JingYe."Fabrication and application of high quality poly(dimethylsiloxane) stamps by gamma ray irradiation".JOURNAL OF MATERIALS CHEMISTRY 21.12(2011):4279.

入库方式: OAI收割

来源:上海应用物理研究所

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