Non-destructive evaluation of semiconductor using laser SQUID microscope
文献类型：期刊论文
| 作者 | Kojima, K ; Suda, S ; Kong, XY ; Itozaki, H |
| 刊名 | PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS
 |
| 出版日期 | 2006 |
| 卷号 | 445页码:979-981 |
| 关键词 | FLUX GUIDE PHOTOMAGNETIC DETECTION DEVICES WAFERS |
| ISSN号 | 0921-4534 |
| 学科主题 | Physics |
| 语种 | 英语 |
| 公开日期 | 2012-07-05 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109111]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Kojima, K,Suda, S,Kong, XY,et al. Non-destructive evaluation of semiconductor using laser SQUID microscope[J]. PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS,2006,445:979-981. |
| APA | Kojima, K,Suda, S,Kong, XY,&Itozaki, H.(2006).Non-destructive evaluation of semiconductor using laser SQUID microscope.PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS,445,979-981. |
| MLA | Kojima, K,et al."Non-destructive evaluation of semiconductor using laser SQUID microscope".PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS 445(2006):979-981. |
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