Effect of Hydrogen Reduction on Characteristics of Cu Thin-Films Deposited by RF-Driven Ar/H-2 Atmospheric Pressure Plasma Jet
文献类型：期刊论文
| 作者 | Zhao, P ; Meng, YD
|
| 刊名 | applied physics express
 |
| 出版日期 | 2012 |
| 中文摘要 | the effect of hydrogen reduction on the characteristics of cu films deposited using a 13.56 mhz rf ar/h-2 atmospheric pressure plasma jet with a cu thin wire set inside a quartz tube was studied. by adding a small amount of h-2 gas into ar carrier gas, it was found that intense emissions of n-2 molecule second positive systems, oh and o emissions were significantly suppressed, while cu and h alpha lines were intensified. it was confirmed by an x-ray photoelectron spectrometry that a high purity cu film was synthesized via hydrogen reduction reaction, preventing the oxidization of cu film. (c) 2012 the japan society of applied physics |
| 学科主题 | 等离子体物理与核聚变研究 |
| 公开日期 | 2012-07-09 |
| 源URL | [http://ir.hfcas.ac.cn/handle/334002/5644]  |
| 专题 | 合肥物质科学研究院_中科院等离子体物理研究所 |
| 推荐引用方式 GB/T 7714 | Zhao, P,Meng, YD. Effect of Hydrogen Reduction on Characteristics of Cu Thin-Films Deposited by RF-Driven Ar/H-2 Atmospheric Pressure Plasma Jet[J]. applied physics express,2012. |
| APA | Zhao, P,&Meng, YD.(2012).Effect of Hydrogen Reduction on Characteristics of Cu Thin-Films Deposited by RF-Driven Ar/H-2 Atmospheric Pressure Plasma Jet.applied physics express. |
| MLA | Zhao, P,et al."Effect of Hydrogen Reduction on Characteristics of Cu Thin-Films Deposited by RF-Driven Ar/H-2 Atmospheric Pressure Plasma Jet".applied physics express (2012). |
入库方式： OAI收割
来源：合肥物质科学研究院
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