An improved, real-time method for removing the cyclic error of a homodyne interferometer
文献类型：会议论文
| 作者 | ZhaoSuwen ; WenDesheng ; ZhuShaolan ; LiangShitong |
| 出版日期 | 2011 |
| 会议名称 | international symposium on photoelectronic detection and imaging 2012: laser sensing and imaging; and biological and medical applications of photonics sensing and imaging |
| 会议日期 | may 24, 2011 - may 26, 2017 |
| 会议地点 | beijing, china |
| 关键词 | single frequency laser interferometer error correction real-time compensation Lissajous figure |
| 页码 | 81924g |
| 通讯作者 | zhao suwen |
| 英文摘要 | the nonlinear error of a homodyne interferometer is presented: the amplitudes, the phase and the offsets. an improved compensation method is introduced since the conventional heydeman modal' calculation is very time-consuming. first, the "zero drift" problem is solved with the polarization phase-shifting technology; second, a fast algorithm based on the heydeman method is introduced to calculate the errors; and third, electronic circuit is used to remove the nonlinear errors timely. the test result shows that the nonlinearity of the homodyne interferometer could be reduced to subnanometer over the measuring range of 20cm, and the accuracy can be improved more than tenfold by the dynamic compensation method. |
| 收录类别 | EI ; CPCI |
| 产权排序 | 1 |
| 会议主办者 | chinese society of astronautics (cas) |
| 会议录 | proceedings of spie - the international society for optical engineering
 |
| 会议录出版者 | spie |
| 会议录出版地 | p.o. box 10, bellingham, wa 98227-0021, united states |
| 语种 | 英语 |
| ISSN号 | 0277-786x |
| 源URL | [http://ir.opt.ac.cn/handle/181661/20168]  |
| 专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
| 推荐引用方式 GB/T 7714 | ZhaoSuwen,WenDesheng,ZhuShaolan,et al. An improved, real-time method for removing the cyclic error of a homodyne interferometer[C]. 见:international symposium on photoelectronic detection and imaging 2012: laser sensing and imaging; and biological and medical applications of photonics sensing and imaging. beijing, china. may 24, 2011 - may 26, 2017. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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