Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGeOriginal
文献类型：期刊论文
| 作者 | Xu, Dapeng ; Wan, Li ; Cheng, Xinhong ; He, Dawei ; Song, Zhaorui ; Yu, Yuehui ; Shen, Dashen |
| 刊名 | Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering.
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| 出版日期 | 2011 |
| 卷号 | 40期号:8页码:1344-1347 |
| ISSN号 | 1002185X |
| 通讯作者 | Xu, D.(xudapeng1123@163.com) |
| 收录类别 | EI-274 |
| 语种 | 英语 |
| 公开日期 | 2012-08-22 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109181]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xu, Dapeng,Wan, Li,Cheng, Xinhong,et al. Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGeOriginal[J]. Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering.,2011,40(8):1344-1347. |
| APA | Xu, Dapeng.,Wan, Li.,Cheng, Xinhong.,He, Dawei.,Song, Zhaorui.,...&Shen, Dashen.(2011).Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGeOriginal.Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering.,40(8),1344-1347. |
| MLA | Xu, Dapeng,et al."Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGeOriginal".Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering. 40.8(2011):1344-1347. |
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