中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Defect reduction in (1 1 (2)over-bar 0) nonpolar a-plane GaN grown on r-plane sapphire using TiN interlayers

文献类型:期刊论文

作者Xu, SR ; Zhang, JC ; Yang, LA ; Zhou, XW ; Cao, YR ; Zhang, JF ; Xue, JS ; Liu, ZY ; Ma, JC ; Bao, F (包峰) ; Hao, Y
刊名JOURNAL OF CRYSTAL GROWTH
出版日期2011-07-15
卷号327期号:1页码:94-97
关键词VAPOR-PHASE EPITAXY LIGHT-EMITTING-DIODES OVERGROWTH
通讯作者Hao, Y
英文摘要

 We report on the use of TiN interlayer to reduce the threading dislocation density in nonpolar a-plane GaN material grown by metal organic chemical vapor deposition (MOCVD), where the interlayer was formed by depositing the Ti metal on a GaN template followed by nitridize. By means of high resolution X-ray diffraction, transmission electron microscopy, and atomic force microscopy analyses, we found that the nonpolar a-plane GaN epitaxial grown on 10 nm-thick TIN interlayer, both on-axis and off-axis, exhibits a significant reduction in the full width at half maximum, the basal plane stacking faults (BSF), the threading dislocation density, and the root-mean-square roughness, respectively.

收录类别SCI ; EI
语种英语
WOS记录号WOS:000293551100016
公开日期2012-08-24
源URL[http://ir.sinano.ac.cn/handle/332007/604]  
专题苏州纳米技术与纳米仿生研究所_测试分析平台
推荐引用方式
GB/T 7714
Xu, SR,Zhang, JC,Yang, LA,et al. Defect reduction in (1 1 (2)over-bar 0) nonpolar a-plane GaN grown on r-plane sapphire using TiN interlayers[J]. JOURNAL OF CRYSTAL GROWTH,2011,327(1):94-97.
APA Xu, SR.,Zhang, JC.,Yang, LA.,Zhou, XW.,Cao, YR.,...&Hao, Y.(2011).Defect reduction in (1 1 (2)over-bar 0) nonpolar a-plane GaN grown on r-plane sapphire using TiN interlayers.JOURNAL OF CRYSTAL GROWTH,327(1),94-97.
MLA Xu, SR,et al."Defect reduction in (1 1 (2)over-bar 0) nonpolar a-plane GaN grown on r-plane sapphire using TiN interlayers".JOURNAL OF CRYSTAL GROWTH 327.1(2011):94-97.

入库方式: OAI收割

来源:苏州纳米技术与纳米仿生研究所

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