Two-dimensional simulation of inductive plasma sources with self-consistent power deposition
文献类型：期刊论文
| 作者 | Li M ; Wu HM(吴汉明); Chen YM
|
| 刊名 | IEEE Transactions on Plasma Science
 |
| 出版日期 | 1995 |
| 卷号 | 23期号:4页码:558-562 |
| 关键词 | Electron-Cyclotron Resonance Energy-Distributions Frequency |
| ISSN号 | 0093-3813 |
| 中文摘要 | A time averaged two-dimensional fluid model including an electromagnetic module with self-consistent power deposition was developed to simulate the transport of a low pressure radio frequency inductively coupled plasma source. Comparsions with experiment and previous simulation results show, that the fluid model is feasible in a certain range of gas pressure. In addition, the effects of gas pressure and power input have been discussed. |
| 类目[WOS] | Physics, Fluids & Plasmas |
| 研究领域[WOS] | Physics |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:A1995RW96300006 |
| 公开日期 | 2009-08-03 ; 2010-08-20 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/39188]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Li M,Wu HM,Chen YM. Two-dimensional simulation of inductive plasma sources with self-consistent power deposition[J]. IEEE Transactions on Plasma Science,1995,23(4):558-562. |
| APA | Li M,吴汉明,&Chen YM.(1995).Two-dimensional simulation of inductive plasma sources with self-consistent power deposition.IEEE Transactions on Plasma Science,23(4),558-562. |
| MLA | Li M,et al."Two-dimensional simulation of inductive plasma sources with self-consistent power deposition".IEEE Transactions on Plasma Science 23.4(1995):558-562. |
入库方式： OAI收割
来源：力学研究所
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