Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering
文献类型：期刊论文
| 作者 | Li HX(李红轩) ; Ji L(吉利); Chen JM(陈建敏); Liu XH(刘晓红); Zhou HD(周惠娣); Li HX(李红轩)
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| 刊名 | Applied Surface Science
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| 出版日期 | 2011 |
| 卷号 | 257期号:无期页码:2269-2274 |
| 关键词 | CrNx films Medium frequency magnetron sputtering N2 content Microstructure Mechanical properties Tribological properties |
| ISSN号 | 0169-4332 |
| 通讯作者 | 李红轩 |
| 中文摘要 | CrNx films were deposited on stainless steel and Si (1 1 1) substrates via medium frequency magnetron sputtering in aN2 +Armixed atmosphere. The influence ofN2 content on the deposition rate, composition, microstructure, mechanical and tribological properties of the as-deposited films was investigated by means of the X-ray photoelectron spectrometry (XPS), X-ray diffraction (XRD), field emission scanning electron microscope (FESEM), nanoindentation and tribometer testing. It was found that the N atomic concentration increased and the phase transformed fromamixture of Cr2N+ Cr(N) to single-phase Cr2N, and then Cr2N+ CrN to pure CrN phase with the increase of N2 content. The Cr 2p3/2 and N 1s of XPS spectra also confirmed the evolution of phase.Accordingly, allfilms exhibited a typical columnar structure which lies in the zone T of Thornton Model. The mixed Cr2N and Cr(N) phases showed low hardness and high friction coefficient. Cr2N possessed higher hardness than CrN while CrN exhibited lower friction coefficient. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (Grant NO.50705093);the Innovative Group Foundation from NSFC (Grant NO.50421502) |
| 语种 | 英语 |
| 公开日期 | 2012-09-24 |
| 源URL | [http://210.77.64.217/handle/362003/670]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 兰州化学物理研究所_先进润滑与防护材料研究发展中心 |
| 通讯作者 | Li HX(李红轩); Li HX(李红轩) |
| 推荐引用方式 GB/T 7714 | Li HX,Ji L,Chen JM,et al. Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering[J]. Applied Surface Science,2011,257(无期):2269-2274. |
| APA | 李红轩,吉利,陈建敏,刘晓红,周惠娣,&李红轩.(2011).Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering.Applied Surface Science,257(无期),2269-2274. |
| MLA | 李红轩,et al."Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering".Applied Surface Science 257.无期(2011):2269-2274. |
入库方式： OAI收割
来源：兰州化学物理研究所
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