Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD)
文献类型：期刊论文
| 作者 | Zhang GA(张广安)
|
| 刊名 | Nuclear Instruments and Methods in Physics Research B
 |
| 出版日期 | 2011 |
| 卷号 | 269页码:1871-1877 |
| 关键词 | Hydrogen-free amorphous carbon (a-C) films Ion beam sputtering deposition (IBSD) Ion beam energy Structure Properties |
| ISSN号 | 0168-583X |
| 通讯作者 | 阎鹏勋 |
| 中文摘要 | Amorphous carbon (a-C) films were fabricated by ion beam sputtering technique. The influence of sput- tering ion beam energy on bonding structure, morphologic, mechanical properties, tribological properties and corrosion resistance of a-C films are investigated systematically. Morphology study shows that low- est surface roughness exists for mid-ion beam energy. Improved adhesion is observed for the films that are prepared under high ion beam energy, attributed to film graphitization, low residual stress and mixed interface. Relatively, a-C films prepared with ion beam energy of 2 keV exhibits optimum sp3 bond con- tent, mechanical properties and corrosion resistance. It is found that the wear rate of DLC films decrease with increased ion beam energy in general, consistent with the varied trend of the H/E value which has been regarded as a suitable parameter for predicting wear resistance of the coatings. The correlation of the sp3 bond fraction in the films estimated from Raman spectroscopy with residual stress, nanohardness and corrosion resistance has been established. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | Youth Science Fund of the National Nature Science Foundation (NO.11004203) |
| 语种 | 英语 |
| 公开日期 | 2012-09-24 |
| 源URL | [http://210.77.64.217/handle/362003/803]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Zhang GA. Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD)[J]. Nuclear Instruments and Methods in Physics Research B,2011,269:1871-1877. |
| APA | 张广安.(2011).Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD).Nuclear Instruments and Methods in Physics Research B,269,1871-1877. |
| MLA | 张广安."Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD)".Nuclear Instruments and Methods in Physics Research B 269(2011):1871-1877. |
入库方式： OAI收割
来源：兰州化学物理研究所
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