The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation
文献类型：期刊论文
| 作者 | Xue QJ(薛群基) ; Yan XB(阎兴斌); Chen JT(陈江涛)
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| 刊名 | Sensors and Actuators B
 |
| 出版日期 | 2011 |
| 卷号 | 160页码:1499-1503 |
| 关键词 | ZnO film Ion implantation Magnetron sputtering Ethanol gas sensor |
| ISSN号 | 0925-4005 |
| 通讯作者 | 阎兴斌 |
| 中文摘要 | The authors present the gas sensors using magnetron sputtered ZnO films modified by Ag ion implan- tation. The results indicate the sensing response of ZnO films is improved by Ag ion implantation, and the sensing response increases with the Ag ion implantation doses. The possible reason of the improved sensing property is that the metallic Ag distributed on the nanograins of implanted ZnO films enhances chemical adsorption and promote catalytic reaction at the surface. However, after long-time conservation, obvious response deterioration for the Ag ion implanted ZnO sensor took place. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the Top Hundred Talents Program of Chinese Academy of Sciences |
| 语种 | 英语 |
| 公开日期 | 2012-09-24 |
| 源URL | [http://210.77.64.217/handle/362003/810]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Yan XB(阎兴斌) |
| 推荐引用方式 GB/T 7714 | Xue QJ,Yan XB,Chen JT. The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation[J]. Sensors and Actuators B,2011,160:1499-1503. |
| APA | 薛群基,阎兴斌,&陈江涛.(2011).The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation.Sensors and Actuators B,160,1499-1503. |
| MLA | 薛群基,et al."The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation".Sensors and Actuators B 160(2011):1499-1503. |
入库方式： OAI收割
来源：兰州化学物理研究所
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