Cathodoluminescence and ion beam analysis of ion-implanted combinatorial materials libraries on thermally grown SiO2
文献类型：期刊论文
| 作者 | Chen, CM（陈昌明） ; Pan, HC ; Zhu, DZ（朱德彰） ; Hu, J（胡钧） ; Li, MQ（李民乾） |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1999 |
| 卷号 | 159期号:40910页码:81 |
| ISSN号 | 0168-583X |
| 英文摘要 | A method combining ion implantation and physical masking technique has been used to generate material libraries of various ion-implanted samples. Ion species of C, Ga, N, Pb, Sn, Y have been sequentially implanted to an SiO2 film grown on a silicon wafer through combinatorial masks and consequently a library of 64 (2(6)) samples is generated by 6 masking combinations. This approach offers rapid synthesis of samples with potential new compounds formed in the matrix, which may have specific luminescent properties. The depth-resolved cathodoluminescence (CL) measurements revealed some specific optical property in the samples correlated with implanted ion distributions. A marker-based technique is developed for the convenient location of sample site in the analysis of Rutherford backscattering spectrometry (RBS) and proton elastic scattering (PES), intended to characterize rapidly the ion implanted film libraries. These measurements demonstrate the power of nondestructively and rapidly characterizing composition and the inhomogeneity of the combinatorial film libraries, which may determine their physical properties. (C) 1999 Elsevier Science B.V. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000083561900010 |
| 公开日期 | 2012-09-25 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/9893]  |
| 专题 | 上海应用物理研究所_中科院上海原子核所2003年前 |
| 推荐引用方式 GB/T 7714 | Chen, CM,Pan, HC,Zhu, DZ,et al. Cathodoluminescence and ion beam analysis of ion-implanted combinatorial materials libraries on thermally grown SiO2[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1999,159(40910):81. |
| APA | Chen, CM,Pan, HC,Zhu, DZ,Hu, J,&Li, MQ.(1999).Cathodoluminescence and ion beam analysis of ion-implanted combinatorial materials libraries on thermally grown SiO2.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,159(40910),81. |
| MLA | Chen, CM,et al."Cathodoluminescence and ion beam analysis of ion-implanted combinatorial materials libraries on thermally grown SiO2".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 159.40910(1999):81. |
入库方式： OAI收割
来源：上海应用物理研究所
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