ITO thin films prepared by electron beam evaporation with End-Hall ion source assisted without heating to the substrate
文献类型：期刊论文
| 作者 | Wang T.T. ; Wang X.Y.; Gao J.S.
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| 刊名 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering
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| 出版日期 | 2005 |
| 卷号 | 13期号:4页码:397-402 |
| ISSN号 | 1004924X |
| 其他题名 | 论文其他题名 |
| 收录类别 | EI |
| 公开日期 | 2012-10-21 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/24556]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Wang T.T.,Wang X.Y.,Gao J.S.. ITO thin films prepared by electron beam evaporation with End-Hall ion source assisted without heating to the substrate[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2005,13(4):397-402. |
| APA | Wang T.T.,Wang X.Y.,&Gao J.S..(2005).ITO thin films prepared by electron beam evaporation with End-Hall ion source assisted without heating to the substrate.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,13(4),397-402. |
| MLA | Wang T.T.,et al."ITO thin films prepared by electron beam evaporation with End-Hall ion source assisted without heating to the substrate".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 13.4(2005):397-402. |
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