Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering
文献类型：期刊论文
| 作者 | Xue QJ(薛群基) ; Wang LP(王立平); Zhang GA(张广安)
|
| 刊名 | Journal of Alloys and Compounds
 |
| 出版日期 | 2009 |
| 卷号 | 486页码:227-232 |
| ISSN号 | 0925-8388 |
| 关键词 | Magnetron sputtering Cr–B–N films Structure Mechanical properties |
| 通讯作者 | 张广安 |
| 中文摘要 | Cr–B–N films with various B contents were deposited by reactive magnetron sputtering from the co- deposition of Cr and B targets in the presence of the reactive gas mixture. Comparative studies on microstructure and mechanical properties between CrN and Cr–B–N films with various B contents were conducted. The addition of B to CrN films caused a decrease of the crystallization of the films, while the B existed mainly as amorphous phase of BN compound in the CrBN films. The mechanical properties were also improved. And the Cr–B–N films with 6.1 at.% B content showed highest hardness and lowest wear rate. |
| 学科主题 | 材料科学与物理化学 |
| 资助信息 | the National Natural Science Foundation of China (No. 50772115);the 863 Program of Chinese Ministry of Science and Technology (No. 2009AA03Z105) |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-11-13 |
| 源URL | [http://210.77.64.217/handle/362003/2052]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Zhang GA(张广安) |
| 推荐引用方式 GB/T 7714 | Xue QJ,Wang LP,Zhang GA. Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering[J]. Journal of Alloys and Compounds,2009,486:227-232. |
| APA | 薛群基,王立平,&张广安.(2009).Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering.Journal of Alloys and Compounds,486,227-232. |
| MLA | 薛群基,et al."Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering".Journal of Alloys and Compounds 486(2009):227-232. |
入库方式： OAI收割
来源：兰州化学物理研究所
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