Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering
文献类型：期刊论文
| 作者 | Shi L(石雷) ; Wang P(王鹏); Liu WM(刘维民); Zhang GA(张广安)
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| 刊名 | Surface & Coatings Technology
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| 出版日期 | 2009 |
| 卷号 | 203页码:1537-1543 |
| ISSN号 | 0257-8972 |
| 关键词 | Magnetron sputtering Ti–Al–C films Mechanical properties Tribological behaviors |
| 通讯作者 | 刘维民 |
| 中文摘要 | Ti–Al–C films were deposited on silicon (100) substrates using magnetron sputtering TiAl target and graphite target in argon atmosphere at various substrate negative bias voltages. The composition, surface morphology, hardness and friction coefficient of the resulting films were characterized using x-ray photoelectron spectroscope, energy dispersive spectrometry, atomic force microscopy, nanoindentation and tribological tester. Results show that the structure and properties of the deposited films strongly depend on the applied substrate negative bias voltage. The Ti–Al–C films deposited at high substrate negative bias voltage show high surface roughness, low hardness and short wear life. In contrast, the Ti–Al–C films deposited without negative bias voltage exhibit uniform and smooth surface, a high hardness of approximately 37 GPa and low friction coefficient and long wear life. Excellent friction and wear behaviors of the Ti–Al–C films deposited without negative bias may be attributed to the dense structure and high hardness. |
| 学科主题 | 材料科学与物理化学 |
| 资助信息 | the Natural Science Foundation of China (Grant No. 50421502);973 Program of China (Grant No. 2007CB607601) |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-11-13 |
| 源URL | [http://210.77.64.217/handle/362003/2121]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Liu WM(刘维民) |
| 推荐引用方式 GB/T 7714 | Shi L,Wang P,Liu WM,et al. Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering[J]. Surface & Coatings Technology,2009,203:1537-1543. |
| APA | 石雷,王鹏,刘维民,&张广安.(2009).Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering.Surface & Coatings Technology,203,1537-1543. |
| MLA | 石雷,et al."Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering".Surface & Coatings Technology 203(2009):1537-1543. |
入库方式： OAI收割
来源：兰州化学物理研究所
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