Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation
文献类型：期刊论文
| 作者 | Mo YF(莫宇飞) ; Zhao WJ(赵文杰) ; Huang DM(黄德明) ; Zhao F(赵飞) ; Bai MW(白明武) |
| 刊名 | Ultramicroscopy
 |
| 出版日期 | 2009 |
| 卷号 | 109页码:247-252 |
| 关键词 | Nanotexture Local anodic oxidation Atomic force microscopy Nanotribology |
| ISSN号 | 0304-3991 |
| 通讯作者 | 白明武 |
| 中文摘要 | Nano-sized textures resulted from localized electrochemical oxidation by using atomic force microscopy (AFM) were fabricated on H-passivated Si surface. In this paper, the fabrication and nanotribological properties of nanotexture by local anodic oxidation (LAO) on H-passivated Si surface are presented. A special attention is paid to find the relation between the size of oxide nanotexture and operational parameters such as tip-sample pulsed bias voltage, pulsewidth, and relative humidity to fabricate oxide nanotexture. The nanotribological properties were investigated by a colloidal probe. The results indicate that the nanotextures exhibited low adhesion and greatly reduced friction force at nanometer scale. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China under Grant no. 50675217;National 973 Program: 2007CB607601 |
| 语种 | 英语 |
| WOS记录号 | WOS:000264280200006 |
| 公开日期 | 2012-11-13 |
| 源URL | [http://210.77.64.217/handle/362003/2152]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Mo YF,Zhao WJ,Huang DM,et al. Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation[J]. Ultramicroscopy,2009,109:247-252. |
| APA | 莫宇飞,赵文杰,黄德明,赵飞,&白明武.(2009).Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation.Ultramicroscopy,109,247-252. |
| MLA | 莫宇飞,et al."Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation".Ultramicroscopy 109(2009):247-252. |
入库方式： OAI收割
来源：兰州化学物理研究所
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