Deposition and properties of Al-containing diamond-like carbon films by a hybrid ion beam sources
文献类型：期刊论文
| 作者 | Dai W(代伟) ; Wang AY(汪爱英) |
| 刊名 | Journal of Alloys and Compounds
 |
| 出版日期 | 2011 |
| 卷号 | 509页码:4646-4631 |
| 关键词 | Diamond-like carbon Internal stress Al incorporation Structure disorder Tribology |
| ISSN号 | 0925-8388 |
| 通讯作者 | 汪爱英 |
| 中文摘要 | Metal incorporation is one of the most effective methods for relaxing internal stress in diamond-like carbon (DLC) films. It was reported that the chemical state of the incorporated metal atoms has a sig- nificant influence on the film internal stress. The doped atoms embedding in the DLC matrix without bonding with C atoms can reduce the structure disorder of the DLC films through bond angle distortion and thus relax the internal stress of the films. In present paper, Al atoms, which are inert to carbon, were incorporated into the DLC films deposited by a hybrid ion beams system comprising an anode-layer ion source and a magnetron sputtering unit. The film composition, microstructure and atomic bond struc- ture were characterized using X-ray photoelectron spectroscopy, transmission electron microscopy and Raman spectroscopy. The internal stress,mechanical properties and tribogoical behaviorwere studied as a function of Al concentration using a stress-tester, nanoindentation and ball-on-disc tribo-tester, respec- tively. The results indicated that the incorporated Al atoms were dissolved in the DLC matrix without bonding with C atoms and the films exhibited the feature of amorphous carbon. The structure disorder of the films tended to decrease with Al atoms incorporation. This resulted in the distinct reduction of the internal stress in the films. All Al-DLC films exhibited a lower friction coefficient comparedwith pure DLC film. The formation of the transfer layer and the graphitization induced by friction were expected to contribute to the excellent friction performance. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the Natural Science Foundation of China (Grant no: 51072205);the Science and Technology Department of Zhejiang Province (Grant no: 2008C21055) |
| 语种 | 英语 |
| 公开日期 | 2012-09-24 |
| 源URL | [http://210.77.64.217/handle/362003/729]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Dai W,Wang AY. Deposition and properties of Al-containing diamond-like carbon films by a hybrid ion beam sources[J]. Journal of Alloys and Compounds,2011,509:4646-4631. |
| APA | 代伟,&汪爱英.(2011).Deposition and properties of Al-containing diamond-like carbon films by a hybrid ion beam sources.Journal of Alloys and Compounds,509,4646-4631. |
| MLA | 代伟,et al."Deposition and properties of Al-containing diamond-like carbon films by a hybrid ion beam sources".Journal of Alloys and Compounds 509(2011):4646-4631. |
入库方式： OAI收割
来源：兰州化学物理研究所
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