Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering
文献类型:期刊论文
作者 | Zhang B(张斌)![]() ![]() ![]() ![]() ![]() ![]() |
刊名 | Applied Surface Science
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出版日期 | 2010 |
卷号 | 256页码:6506-6511 |
关键词 | Nanocolumn structure Nanoporous structure Field emission properties |
ISSN号 | 0169-4332 |
通讯作者 | 张俊彦 |
中文摘要 | Different nitrogen doped amorphous carbon (CNx) films were obtained by magnetron sputtering of car-bon target in argon and nitrogen atmosphere at the increasing negative bias voltages from 0 to 150V.The films structures have experienced great change, from the novel column to nanoporous structure atthe bias voltage of 0V to the porous structure at 150V. The proposed growth process was that the CNxnuclei grewat 0V acted as the “seeds” for the growth of the nanocolumns, and ion etching effects at 150Vinduced the formation of nanoporous structures. Furthermore, a comparison study showed that the fieldemission properties of the CNx films were related with the introduction of the nitrogen atoms, the sizeand concentration of sp2 C clusters and the surface roughness. The filmswith rougher surface have lowerthreshold field. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the“863” program of Chinese Ministry of Science and Technology, with grant No. 2007AA03Z338;National Science Foundation of China (Nos. 50823008, 50975273) |
语种 | 英语 |
公开日期 | 2012-09-28 |
源URL | [http://210.77.64.217/handle/362003/960] ![]() |
专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
通讯作者 | Zhang JY(张俊彦); Zhang JY(张俊彦) |
推荐引用方式 GB/T 7714 | Zhang B,Zhang JY,Zhang JY,et al. Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering[J]. Applied Surface Science,2010,256:6506-6511. |
APA | 张斌,张俊彦,张俊彦,于元烈,于元烈,&于元烈.(2010).Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering.Applied Surface Science,256,6506-6511. |
MLA | 张斌,et al."Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering".Applied Surface Science 256(2010):6506-6511. |
入库方式: OAI收割
来源:兰州化学物理研究所
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