Molecular dynamical simulations on a-C:H film growth from atomic flux of C and H: Effect of H fraction
文献类型：期刊论文
| 作者 | Zhou HD(周惠娣) ; Ji L(吉利); Li HX(李红轩); Chen JM(陈建敏); Chen JM(陈建敏)
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| 刊名 | Physics Letters A
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| 出版日期 | 2010 |
| 卷号 | 374期号:21页码:2150-2155 |
| 关键词 | Hydrogenated carbon film H fraction Deposition mechanism Molecular dynamical simulation |
| ISSN号 | 0375-9601 |
| 通讯作者 | 陈建敏 |
| 中文摘要 | Molecular dynamical simulations are carried out to studying the hydrogenated amorphous carbon (a-C:H) film growth from C and H atoms. The effects of the H fraction in source atoms and incident energy on the film formation are investigated. Our simulations show that almost all the H atoms incorporating into the films bond to carbon and the amount of H2 molecules is very slight. Increasing the H fraction in source atoms raises the sp3-C fraction, leads to a linear increase of H concentration in film, but decreases the film growth rate. The influence of H fraction on the film growth mechanism is also discussed. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (Grant No. 50705093, No. 50575217);the Innovative Group Foundation from NSFC (Grant No.50421502);the National 973 Project (No. 2007 CB607601) |
| 语种 | 英语 |
| 公开日期 | 2012-09-28 |
| 源URL | [http://210.77.64.217/handle/362003/1053]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 兰州化学物理研究所_先进润滑与防护材料研究发展中心 |
| 通讯作者 | Chen JM(陈建敏); Chen JM(陈建敏) |
| 推荐引用方式 GB/T 7714 | Zhou HD,Ji L,Li HX,et al. Molecular dynamical simulations on a-C:H film growth from atomic flux of C and H: Effect of H fraction[J]. Physics Letters A,2010,374(21):2150-2155. |
| APA | 周惠娣,吉利,李红轩,陈建敏,&陈建敏.(2010).Molecular dynamical simulations on a-C:H film growth from atomic flux of C and H: Effect of H fraction.Physics Letters A,374(21),2150-2155. |
| MLA | 周惠娣,et al."Molecular dynamical simulations on a-C:H film growth from atomic flux of C and H: Effect of H fraction".Physics Letters A 374.21(2010):2150-2155. |
入库方式： OAI收割
来源：兰州化学物理研究所
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