Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering
文献类型：期刊论文
| 作者 | Yang J(杨军) ; Hao JY(郝俊英); Liu WM(刘维民); Liu XQ(刘小强)
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| 刊名 | Materials Science and Technology
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| 出版日期 | 2011 |
| 卷号 | 27期号:11页码:1669-1673 |
| 关键词 | Amorphous carbon films Titanium carbide Radio frequency sputtering Nanostructure Lubrication |
| ISSN号 | 0267-0836 |
| 通讯作者 | 郝俊英 |
| 中文摘要 | Amorphous carbon films containing titanium carbide (nc-TiC/a-C:H) were deposited onto n-type silicon (100) by radio frequency reactive sputtering titanium target in an Ar–CH4 mixed atmosphere. The composition and microstructure of the films were characterised by means of X-ray photoelectron spectroscopy, field emitted SEM, XRD and Raman spectra. The mechanical and tribological properties of the films were measured by a nanoindentation tester and a ball-on- disc UMT–2MT tribometer. By adjusting the CH4 flowrate, Ti content in the films could be controlled, and a transition in structures of the films from loose polymer-like to glassy and dense nanostructure was observed. The density of coatings was improved by the introduction of TiC nanocrystalline particles. The mechanical and lubricious properties were different accordingly. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (grant NO.50905177;NO.50823008);the National 973 Project of China (grant NO.2007CB607601);the Innovative Group Foundation from the National Natural Science Foundation of China (grant NO.50721062) |
| 语种 | 英语 |
| 公开日期 | 2012-11-29 |
| 源URL | [http://210.77.64.217/handle/362003/2248]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Hao JY(郝俊英) |
| 推荐引用方式 GB/T 7714 | Yang J,Hao JY,Liu WM,et al. Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering[J]. Materials Science and Technology,2011,27(11):1669-1673. |
| APA | 杨军,郝俊英,刘维民,&刘小强.(2011).Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering.Materials Science and Technology,27(11),1669-1673. |
| MLA | 杨军,et al."Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering".Materials Science and Technology 27.11(2011):1669-1673. |
入库方式： OAI收割
来源：兰州化学物理研究所
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