中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering

文献类型:期刊论文

作者Yang J(杨军); Hao JY(郝俊英); Liu WM(刘维民); Liu XQ(刘小强)
刊名Materials Science and Technology
出版日期2011
卷号27期号:11页码:1669-1673
关键词Amorphous carbon films Titanium carbide Radio frequency sputtering Nanostructure Lubrication
ISSN号0267-0836
通讯作者郝俊英
中文摘要Amorphous carbon films containing titanium carbide (nc-TiC/a-C:H) were deposited onto n-type silicon (100) by radio frequency reactive sputtering titanium target in an Ar–CH4 mixed atmosphere. The composition and microstructure of the films were characterised by means of X-ray photoelectron spectroscopy, field emitted SEM, XRD and Raman spectra. The mechanical and tribological properties of the films were measured by a nanoindentation tester and a ball-on- disc UMT–2MT tribometer. By adjusting the CH4 flowrate, Ti content in the films could be controlled, and a transition in structures of the films from loose polymer-like to glassy and dense nanostructure was observed. The density of coatings was improved by the introduction of TiC nanocrystalline particles. The mechanical and lubricious properties were different accordingly.
学科主题材料科学与物理化学
收录类别SCI
资助信息the National Natural Science Foundation of China (grant NO.50905177;NO.50823008);the National 973 Project of China (grant NO.2007CB607601);the Innovative Group Foundation from the National Natural Science Foundation of China (grant NO.50721062)
语种英语
公开日期2012-11-29
源URL[http://210.77.64.217/handle/362003/2248]  
专题兰州化学物理研究所_固体润滑国家重点实验室
通讯作者Hao JY(郝俊英)
推荐引用方式
GB/T 7714
Yang J,Hao JY,Liu WM,et al. Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering[J]. Materials Science and Technology,2011,27(11):1669-1673.
APA 杨军,郝俊英,刘维民,&刘小强.(2011).Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering.Materials Science and Technology,27(11),1669-1673.
MLA 杨军,et al."Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering".Materials Science and Technology 27.11(2011):1669-1673.

入库方式: OAI收割

来源:兰州化学物理研究所

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