Substrate emitting vertical-cavity surface-emitting laser
文献类型：专利
| 作者 | SIRBU, ALEXEI; IAKOVLEV, VLADIMIR; BERK, YURI; MENTOVICH, ELAD |
| 发表日期 | 2019-10-29 |
| 专利号 | US10461507 |
| 著作权人 | MELLANOX TECHNOLOGIES, LTD. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Substrate emitting vertical-cavity surface-emitting laser |
| 英文摘要 | A vertical-cavity surface-emitting laser (VCSEL), substrate emitting VCSEL, and multi-beam emitting device and corresponding manufacturing processes are provided. An example VCSEL comprises a substrate having a first surface and a second surface; an output coupling mirror disposed on the second surface of the substrate; a high reflectivity mirror; and an active cavity material structure disposed between the output coupling mirror and the high reflectivity mirror. The active cavity material structure comprises a first current-spreading layer, a second current-spreading layer, an active region disposed between the first current-spreading layer and the second current-spreading layer, and a tunnel junction overgrown by the second current spreading layer, wherein the tunnel junction is disposed adjacent the active region. The VCSEL is configured to emit radiation outward through the first surface of the substrate. |
| 公开日期 | 2019-10-29 |
| 申请日期 | 2018-04-04 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/32157]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MELLANOX TECHNOLOGIES, LTD. |
| 推荐引用方式 GB/T 7714 | SIRBU, ALEXEI,IAKOVLEV, VLADIMIR,BERK, YURI,et al. Substrate emitting vertical-cavity surface-emitting laser. US10461507. 2019-10-29. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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