Near-field light source device, and optical head, optical device, exposure apparatus and microscope device having such a near-field light source device
文献类型：专利
| 作者 | MIZUTANI, NATSUHIKO; YAMADA, TOMOHIRO |
| 发表日期 | 2007-10-09 |
| 专利号 | US7280578 |
| 著作权人 | CANON KABUSHIKI KAISHA |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Near-field light source device, and optical head, optical device, exposure apparatus and microscope device having such a near-field light source device |
| 英文摘要 | A near-field light source device including a semiconductor laser comprised of laminated semiconductor layers and having a ring-type optical resonator with a plurality of wave guides connected via mirror portions, a light blocking film formed in one of the mirror portions and having a small opening not greater than a wavelength size, and a diffraction grating formed on the light blocking film. The light oscillated from the semiconductor laser is diffracted by the diffraction grating, the diffracted light is coupled to a rotation mode in the ring-type optical resonator, and near-field light is generated via the small opening. |
| 公开日期 | 2007-10-09 |
| 申请日期 | 2004-09-10 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/33907]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CANON KABUSHIKI KAISHA |
| 推荐引用方式 GB/T 7714 | MIZUTANI, NATSUHIKO,YAMADA, TOMOHIRO. Near-field light source device, and optical head, optical device, exposure apparatus and microscope device having such a near-field light source device. US7280578. 2007-10-09. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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