Laser amplifier, laser apparatus, and extreme ultraviolet light generating system
文献类型：专利
| 作者 | SUGANUMA, TAKASHI; HOSHINO, HIDEO |
| 发表日期 | 2017-06-20 |
| 专利号 | US9685756 |
| 著作权人 | GIGAPHOTON INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Laser amplifier, laser apparatus, and extreme ultraviolet light generating system |
| 英文摘要 | There may be provided a laser amplifier including: a chamber containing a laser medium; a first window provided on the chamber, and configured to allow a laser light beam inputted from outside of the chamber to enter the chamber; an excitation unit configured to amplify, by exciting the laser medium, the laser light beam that has entered the chamber; a second window provided on the chamber, and configured to allow the laser light beam that has been amplified by the excitation unit to exit from the chamber to the outside; a mirror provided on a laser light path between the first window and the second window; and a wavelength selection film provided on one or more of the first window, the second window, and the mirror, and configured to suppress propagation of light beams of one or more suppression target wavelengths different from a desired wavelength. |
| 公开日期 | 2017-06-20 |
| 申请日期 | 2016-02-10 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/34297]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | GIGAPHOTON INC. |
| 推荐引用方式 GB/T 7714 | SUGANUMA, TAKASHI,HOSHINO, HIDEO. Laser amplifier, laser apparatus, and extreme ultraviolet light generating system. US9685756. 2017-06-20. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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