Silicon-based mounting structure for semiconductor optical devices
文献类型：专利
| 作者 | DIETRICH, NORMAN R.; MOYER, RALPH S.; WONG, YIU-HUEN |
| 发表日期 | 1990-06-26 |
| 专利号 | US4937660 |
| 著作权人 | BELL TELEPHONE LABORATORIES, INCORPORATED, 600 MOUNTAIN AVE., MURRAY HILL, NJ 07974-2070, A CORP. OF NY |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Silicon-based mounting structure for semiconductor optical devices |
| 英文摘要 | A silicon-based laser mounting structure (10) is disclosed which provides improved interconnection between a semiconductor optical device, such as a laser (12), and an external high frequency modulation current source, by reducing the presence of parasitic inductive elements in the interconnecting network. The structure includes a stripline transmission path formed by depositing metal conductive strips on the top and bottom surfaces of a silicon substrate (16). The conductive strips are coupled at one end to the external modulation current source. A thin film resistor (14) is deposited between the second end of the top conductive strip and the semiconductor optical device. This thin film resistor (14) is utilized to provide impedance matching between the optical device and the stripline. That is, for a laser (12) with an impedance ZL, and a stripline designed to have an impedance ZS, the resistance R is chosen such that R+ZL=ZS. Utilizing silicon processing techniques, the thin film resistor may be placed adjacent to the laser (12), reducing the parasitics associated with their interconnection. A conductive via is formed through the substrate (16) to provide a top-side bonding location for connecting the optical device to the bottom metal conductor. by providing the top-side site, the parasitic inductance associated with this interconnection is considerably reduced. |
| 公开日期 | 1990-06-26 |
| 申请日期 | 1988-12-21 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/34864]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | BELL TELEPHONE LABORATORIES, INCORPORATED, 600 MOUNTAIN AVE., MURRAY HILL, NJ 07974-2070, A CORP. OF NY |
| 推荐引用方式 GB/T 7714 | DIETRICH, NORMAN R.,MOYER, RALPH S.,WONG, YIU-HUEN. Silicon-based mounting structure for semiconductor optical devices. US4937660. 1990-06-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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