Method for producing a microsystem and forming a microsystem laser therefrom
文献类型：专利
| 作者 | HEINEMANN, STEFAN; MEHNERT, AXEL; PEUSER, PETER; SCHMITT, NIKOLAUS; SEIDEL, HELMUT |
| 发表日期 | 1997-06-10 |
| 专利号 | US5637885 |
| 著作权人 | DEUTSCHE AEROSPACE AG |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method for producing a microsystem and forming a microsystem laser therefrom |
| 英文摘要 | The invention relates to a method for producing a microsystem and from it forming a microsystem laser, which preferably has a vertical structural element by contacting of wafer plates, which carry different functional elements of a system, so that this system on the one hand thus includes heterogeneous functions such as actuators, optics, sensors, cooling systems, micromechanics and electronics, and on the other hand, the wafer carrying these functions permits a relatively homogeneous processing of quite similar functions integrated each on one wafer, so that the complexity of the system is created for the first time for the vertical arrangement of these functions. |
| 公开日期 | 1997-06-10 |
| 申请日期 | 1995-04-07 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/35076]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | DEUTSCHE AEROSPACE AG |
| 推荐引用方式 GB/T 7714 | HEINEMANN, STEFAN,MEHNERT, AXEL,PEUSER, PETER,et al. Method for producing a microsystem and forming a microsystem laser therefrom. US5637885. 1997-06-10. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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