Corrosion protection in the fabrication of optoelectronic assemblies
文献类型:专利
作者 | BRADY, MICHAEL FRANCIS; DAUTARTAS, MINDAUGAS FERNAND; NIJANDER, CASIMIR ROMAN; OSENBACH, JOHN WILLIAM |
发表日期 | 2000-10-10 |
专利号 | US6130107 |
著作权人 | LUCENT TECHNOLOGIES INC. |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Corrosion protection in the fabrication of optoelectronic assemblies |
英文摘要 | The invention is a method for protecting an aluminum layer from corrosion when it is formed by means of a photoresist mask on the same substrate as a multilayer such as titanium, platinum, and gold. A protection layer such as titanium is formed over the aluminum layer prior to stripping the photoresist mask, and is removed subsequent to stripping and prior to bonding components to the aluminum layer. |
公开日期 | 2000-10-10 |
申请日期 | 1999-04-15 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/35292] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | LUCENT TECHNOLOGIES INC. |
推荐引用方式 GB/T 7714 | BRADY, MICHAEL FRANCIS,DAUTARTAS, MINDAUGAS FERNAND,NIJANDER, CASIMIR ROMAN,et al. Corrosion protection in the fabrication of optoelectronic assemblies. US6130107. 2000-10-10. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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