Rotary electrostatic microactuator
文献类型：专利
| 作者 | JERMAN, JOHN H.; GRADE, JOHN D. |
| 发表日期 | 2005-01-25 |
| 专利号 | US6847151 |
| 著作权人 | COHERENT, INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Rotary electrostatic microactuator |
| 英文摘要 | A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice. |
| 公开日期 | 2005-01-25 |
| 申请日期 | 2002-09-11 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/35499]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | COHERENT, INC. |
| 推荐引用方式 GB/T 7714 | JERMAN, JOHN H.,GRADE, JOHN D.. Rotary electrostatic microactuator. US6847151. 2005-01-25. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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