Balanced microdevice
文献类型：专利
| 作者 | JERMAN, JOHN H.; GRADE, JOHN D. |
| 发表日期 | 2005-06-07 |
| 专利号 | US6903486 |
| 著作权人 | COHERENT, INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Balanced microdevice |
| 英文摘要 | A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces. |
| 公开日期 | 2005-06-07 |
| 申请日期 | 2002-09-19 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/35501]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | COHERENT, INC. |
| 推荐引用方式 GB/T 7714 | JERMAN, JOHN H.,GRADE, JOHN D.. Balanced microdevice. US6903486. 2005-06-07. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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