Distributed feedback laser diode and a method for manufacturing the same
文献类型:专利
作者 | KAWAHARA, TAKAHIKO |
发表日期 | 2009-12-01 |
专利号 | US7627011 |
著作权人 | SUMITOMO ELECTRIC INDUSTRIES, LTD. |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Distributed feedback laser diode and a method for manufacturing the same |
英文摘要 | The present invention is to provide a DFB-LD with a larger coupling efficiency between the grating and the active layer. The DFB-LD of the invention provides an n-type InP substrate, an n-type InP buffer layer, an AlGaInAs layer, a intermediate layer made of a material belonging to a group III-V compound semiconductor and containing phosphorous, and an active layer. The InP substrate and the InP buffer layer form a periodic undulation of the grating. Because of the AlGaInAs layer just provided on the InP buffer layer, the AlGaInAs layer and the intermediate layer can be thinned to get a flat top surface, which enhances the coupling efficiency between the grating and the active layer. |
公开日期 | 2009-12-01 |
申请日期 | 2007-01-05 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/35569] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | SUMITOMO ELECTRIC INDUSTRIES, LTD. |
推荐引用方式 GB/T 7714 | KAWAHARA, TAKAHIKO. Distributed feedback laser diode and a method for manufacturing the same. US7627011. 2009-12-01. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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