Waveguide type optical device and method for manufacturing the same
文献类型:专利
作者 | OKAMURA, KOJI; ARIMA, TADAO |
发表日期 | 1994-03-29 |
专利号 | US5299276 |
著作权人 | FUJITSU LIMITED |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Waveguide type optical device and method for manufacturing the same |
英文摘要 | A method for fabricating a waveguide type optical device is disclosed, through which a core and a reference plane are obtained at the same time by etching a core layer using a thin layer of a predetermined shape formed on the core layer as a mask. In this waveguide type optical device, the core is easily coupled with an optical element such as an optical fiber by means of the reference plane. |
公开日期 | 1994-03-29 |
申请日期 | 1992-10-09 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/36114] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FUJITSU LIMITED |
推荐引用方式 GB/T 7714 | OKAMURA, KOJI,ARIMA, TADAO. Waveguide type optical device and method for manufacturing the same. US5299276. 1994-03-29. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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