Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
文献类型：专利
| 作者 | WOJNAROWSKI, ROBERT J.; COLE, HERBERT S.; HENKES, JOHN L. |
| 发表日期 | 1996-06-11 |
| 专利号 | US5525190 |
| 著作权人 | MARTIN MARIETTA CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography |
| 英文摘要 | HDI fabrication techniques are employed to form a variety of optical waveguide structures in polymer materials. Adaptive optical connections are formed, taking into account the actual position and orientation of devices which may deviate from the ideal. Structures include solid light-conducting structures, hollow light-conducting structures which are also suitable for conducting cooling fluid, and optical switching devices employing liquid crystal material. A "shrink back" method may be used to form a tunnel in polymer material which is then filled with an uncured polymer material that shrinks upon curing. |
| 公开日期 | 1996-06-11 |
| 申请日期 | 1995-03-22 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/36242]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MARTIN MARIETTA CORPORATION |
| 推荐引用方式 GB/T 7714 | WOJNAROWSKI, ROBERT J.,COLE, HERBERT S.,HENKES, JOHN L.. Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography. US5525190. 1996-06-11. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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