Monolithic microchannel heatsink
文献类型:专利
作者 | BENETT, WILLIAM J.; BEACH, RAYMOND J.; CIARLO, DINO R. |
发表日期 | 1996-08-20 |
专利号 | US5548605 |
著作权人 | LAWRENCE LIVERMORE NATIONAL SECURITY LLC |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Monolithic microchannel heatsink |
英文摘要 | A silicon wafer has slots sawn in it that allow diode laser bars to be mounted in contact with the silicon. Microchannels are etched into the back of the wafer to provide cooling of the diode bars. To facilitate getting the channels close to the diode bars, the channels are rotated from an angle perpendicular to the diode bars which allows increased penetration between the mounted diode bars. This invention enables the fabrication of monolithic silicon microchannel heatsinks for laser diodes. The heatsinks have low thermal resistance because of the close proximity of the microchannels to the laser diode being cooled. This allows high average power operation of two-dimensional laser diode arrays that have a high density of laser diode bars and therefore high optical power density. |
公开日期 | 1996-08-20 |
申请日期 | 1995-05-15 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/36254] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | LAWRENCE LIVERMORE NATIONAL SECURITY LLC |
推荐引用方式 GB/T 7714 | BENETT, WILLIAM J.,BEACH, RAYMOND J.,CIARLO, DINO R.. Monolithic microchannel heatsink. US5548605. 1996-08-20. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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