Diamond heat sink comprising synthetic diamond film
文献类型：专利
| 作者 | SHIOMI, HIROMU; NAKAHATA, HIDEAKI; NISHIBAYASHI, YOSHIKI; SHIKATA, SHIN-ICHI |
| 发表日期 | 1997-09-02 |
| 专利号 | US5663595 |
| 著作权人 | SUMITOMO ELECTRIC INDUSTRIES, LTD. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Diamond heat sink comprising synthetic diamond film |
| 英文摘要 | A diamond heat sink of the present invention comprises: a support layer consisting of substantially undoped vapor phase synthetic diamond; a heat sensitive layer consisting of doped vapor phase synthetic diamond formed on the surface of the support layer; an insulation layer consisting of substantially undoped vapor phase synthetic diamond formed on a predetermined region of the heat sensitive layer; and an electrode formed on the heat sensitive layer. The electrode typically consists of a metal, preferably Ti/Mo/Au or Ti/Pt/Au. The diamond heat sink of the present invention may further include a highly-doped layer for creating Ohmic contacts with the metal electrode, which is made of the vapor phase synthetic diamond having high impurity levels, and which is disposed between the metal electrode and the heat sensitive layer. |
| 公开日期 | 1997-09-02 |
| 申请日期 | 1995-07-31 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/36273]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SUMITOMO ELECTRIC INDUSTRIES, LTD. |
| 推荐引用方式 GB/T 7714 | SHIOMI, HIROMU,NAKAHATA, HIDEAKI,NISHIBAYASHI, YOSHIKI,et al. Diamond heat sink comprising synthetic diamond film. US5663595. 1997-09-02. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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