Bonding of aluminum oxide components to silicons substrates
文献类型：专利
| 作者 | BRADY, MICHAEL FRANCIS; DAUTARTAS, MINDAUGAS FERNAND; DORMER, JAMES F.; MERCHANT, SAILESH MANSINH; NIJANDER, CASIMIR ROMAN; OSENBACH, JOHN WILLIAM |
| 发表日期 | 2000-03-07 |
| 专利号 | US6034405 |
| 著作权人 | AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Bonding of aluminum oxide components to silicons substrates |
| 英文摘要 | The invention is a method and resulting device which provides a strong bond between a silicon substrate and an oxide component mounted within a cavity in the substrate. A layer of titanium, for example, is deposited on the walls of the cavity, followed by deposition of a layer of aluminum. The structure is preferably annealed to form titanium silicide and titanium-aluminum interface layers. The component is then bonded to the aluminum layer. |
| 公开日期 | 2000-03-07 |
| 申请日期 | 1997-07-22 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/36417]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. |
| 推荐引用方式 GB/T 7714 | BRADY, MICHAEL FRANCIS,DAUTARTAS, MINDAUGAS FERNAND,DORMER, JAMES F.,et al. Bonding of aluminum oxide components to silicons substrates. US6034405. 2000-03-07. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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