Micro benchtop optics by bulk silicon micromachining
文献类型：专利
| 作者 | LEE, ABRAHAM P.; POCHA, MICHAEL D.; MCCONAGHY, CHARLES F.; DERI, ROBERT J. |
| 发表日期 | 2000-06-06 |
| 专利号 | US6071426 |
| 著作权人 | LAWRENCE LIVERMORE NATIONAL SECURITY LLC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Micro benchtop optics by bulk silicon micromachining |
| 英文摘要 | Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems. |
| 公开日期 | 2000-06-06 |
| 申请日期 | 1997-12-08 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/36453]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | LAWRENCE LIVERMORE NATIONAL SECURITY LLC |
| 推荐引用方式 GB/T 7714 | LEE, ABRAHAM P.,POCHA, MICHAEL D.,MCCONAGHY, CHARLES F.,et al. Micro benchtop optics by bulk silicon micromachining. US6071426. 2000-06-06. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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